Invention Grant
- Patent Title: Apparatus and method for bearing a lithography mask
-
Application No.: US15357177Application Date: 2016-11-21
-
Publication No.: US09964862B2Publication Date: 2018-05-08
- Inventor: Albrecht Hof
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102015015423 20151127
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
An apparatus for bearing a lithography mask with a reticle stage includes a resting support holder for the lithography mask. The resting support holder has bearing points which bear the lithography mask. Optionally, the resting support holder optionally has exactly four bearing points. An associated method adjusts the height of the fourth bearing point until all bearing points bear the same supporting force.
Public/Granted literature
- US20170153555A1 APPARATUS AND METHOD FOR BEARING A LITHOGRAPHY MASK Public/Granted day:2017-06-01
Information query
IPC分类: