- Patent Title: Supporting case and multi charged particle beam drawing apparatus
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Application No.: US15273864Application Date: 2016-09-23
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Publication No.: US09966229B2Publication Date: 2018-05-08
- Inventor: Hiroshi Matsumoto
- Applicant: NuFlare Technology, Inc.
- Applicant Address: JP Yokohama-shi
- Assignee: NuFlare Technology, Inc.
- Current Assignee: NuFlare Technology, Inc.
- Current Assignee Address: JP Yokohama-shi
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2015-206464 20151020
- Main IPC: H01J37/30
- IPC: H01J37/30

Abstract:
In one embodiment, a supporting case includes a lower case member and an upper case member. The mounting substrate is pinched between a lower cylindrical supporting portion and a upper cylindrical supporting portion. Peripheral regions of the mounting substrate that are on a peripheral side with respect to a part pinched between the lower cylindrical supporting portion and the upper cylindrical supporting portion are positioned in a space defined by a bottom plate portion, a lower peripheral-wall portion, and the lower cylindrical supporting portion of the lower case member and a top lid portion, an upper peripheral-wall portion, and the upper cylindrical supporting portion of the upper case member.
Public/Granted literature
- US20170110288A1 SUPPORTING CASE AND MULTI CHARGED PARTICLE BEAM DRAWING APPARATUS Public/Granted day:2017-04-20
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