Invention Grant
- Patent Title: Semiconductor device and manufacturing method thereof
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Application No.: US15397052Application Date: 2017-01-03
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Publication No.: US09966276B2Publication Date: 2018-05-08
- Inventor: Won Chul Do , Doo Hyun Park , Jong Sik Paek , Ji Hun Lee , Seong Min Seo
- Applicant: Amkor Technology, Inc.
- Applicant Address: US AZ Tempe
- Assignee: AMKOR TECHNOLOGY, INC.
- Current Assignee: AMKOR TECHNOLOGY, INC.
- Current Assignee Address: US AZ Tempe
- Agency: McAndrews, Held & Malloy, Ltd.
- Priority: KR10-2012-0126932 20121109
- Main IPC: H01L21/48
- IPC: H01L21/48 ; H01L21/56 ; H01L21/683 ; H01L23/498 ; H01L23/00

Abstract:
Provided are a semiconductor device including an interposer having a relatively thin thickness without a through silicon via and a method of manufacturing the same. The method of manufacturing a semiconductor device includes forming an interposer including a redistribution layer and a dielectric layer on a dummy substrate, connecting a semiconductor die to the redistribution layer facing an upper portion of the interposer, encapsulating the semiconductor die by using an encapsulation, removing the dummy substrate from the interposer, and connecting a bump to the redistribution layer facing a lower portion of the interposer.
Public/Granted literature
- US20170125264A1 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2017-05-04
Information query
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