Invention Grant
- Patent Title: Solid-state image sensor and method of manufacturing the same
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Application No.: US15415245Application Date: 2017-01-25
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Publication No.: US09966395B2Publication Date: 2018-05-08
- Inventor: Satoshi Kato , Shuji Tobashi , Masayuki Tsuchiya
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2016-021236 20160205
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H04N5/378

Abstract:
A solid-state image sensor is provided. The sensor includes a first transistor including a first diffusion region, a second transistor including a second diffusion region and an insulation film arranged over these transistors. The insulation film includes a first and a second film. A first portion of the first diffusion region covered with the insulation film includes a second portion covered with only the second film. A third portion of the second diffusion region covered with the insulation film includes a fourth portion covered with the first and second film. A stress in the fourth portion is larger than the second portion. A proportion of an area of the first portion except the second portion to an area of the first portion is lower than a proportion of an area of the fourth portion to an area of the third portion.
Public/Granted literature
- US20170229498A1 SOLID-STATE IMAGE SENSOR AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2017-08-10
Information query
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