Invention Grant
- Patent Title: Nanowire-based vertical memory cell array having a back plate and nanowire seeds contacting a bit line
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Application No.: US15078112Application Date: 2016-03-23
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Publication No.: US09966431B2Publication Date: 2018-05-08
- Inventor: Waikin Li , Chengwen Pei , Ping-Chuan Wang
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- Agent Anthony Canale; Andrew M. Calderon
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L27/108 ; H01L29/423 ; H01L23/522

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to vertical memory cell structures and methods of manufacture. The vertical memory cell includes a vertical nanowire capacitor and vertical pass gate transistor. The vertical nanowire capacitor composes of: a plurality of vertical nanowires extending from an insulator layer; a dielectric material on vertical sidewalls of the plurality of vertical nanowires; doped material provided between the plurality of vertical nanowire; the pass gate transistor composes of: high-k dielectric on top part of the nanowire, metal layer surrounding high-k material as all-around gate. And there is dielectric layer in between vertical nanowire capacitor and vertical nanowire transistor as insulator. At least one bitline extending on a top of the plurality of vertical nanowires and in electrical contact therewith; and at least one wordline formed on vertical sidewalls of the plurality of vertical nanowires and separated therefrom by the dielectric material.
Public/Granted literature
- US20170278927A1 HIGH DENSITY MEMORY CELL STRUCTURES Public/Granted day:2017-09-28
Information query
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