Invention Grant
- Patent Title: Switching device
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Application No.: US15425411Application Date: 2017-02-06
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Publication No.: US09966460B2Publication Date: 2018-05-08
- Inventor: Akitaka Soeno , Takashi Kuno
- Applicant: TOYOTA JIDOSHA KABUSHIKI KAISHA
- Applicant Address: JP Toyota
- Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
- Current Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
- Current Assignee Address: JP Toyota
- Agency: Oliff PLC
- Priority: JP2016-046118 20160309
- Main IPC: H01L29/739
- IPC: H01L29/739 ; H01L23/528 ; H01L29/06 ; H01L29/10 ; H01L29/423

Abstract:
A switching device includes a semiconductor substrate having a first element range and an ineffective range. First trenches extend in a first direction across the first element range and the ineffective range. Second trenches are provided in each inter-trench region within the first element range and are not provided within the ineffective range. A gate electrode is disposed in the trenches. No contact hole is provided in an interlayer insulating film within the ineffective range. The first metal layer covers the interlayer insulating film. The insulating protective film covers a portion of the first metal layer on its outer peripheral side within the ineffective range. The second metal region is in contact with the first metal layer within an opening of the insulating protective film, and is in contact with a side surface of the opening.
Public/Granted literature
- US20170263738A1 SWITCHING DEVICE Public/Granted day:2017-09-14
Information query
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