Invention Grant
- Patent Title: Vacuum process chamber component and methods of making
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Application No.: US12892219Application Date: 2010-09-28
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Publication No.: US09969022B2Publication Date: 2018-05-15
- Inventor: Vijay D. Parkhe
- Applicant: Vijay D. Parkhe
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Servilla Whitney LLC
- Main IPC: B23K1/00
- IPC: B23K1/00 ; B23K1/19 ; B23K101/20 ; B23K103/18 ; F16B5/08 ; B23K103/10 ; B23K103/12 ; B23K103/00 ; B23K103/04
Abstract:
A vacuum process chamber component comprising two separate pieces with an o-ring between the pieces and solder bonded together is described. The component may be an electrostatic chuck comprising a ceramic electrostatic puck and a metal baseplate with at least one o-ring therebetween and joined by a solder bond is described. Methods of making and using vacuum process chamber component are also described.
Public/Granted literature
- US20120076574A1 Vacuum Process Chamber Component and Methods of Making Public/Granted day:2012-03-29
Information query
IPC分类:
