Invention Grant
- Patent Title: Methods for mounting a MEMS sensor for in-stream measurements
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Application No.: US15069948Application Date: 2016-03-14
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Publication No.: US09969608B2Publication Date: 2018-05-15
- Inventor: Tom Kwa , Danny Do , Gary Winzeler , Emir Vukotic
- Applicant: DUNAN SENSING, LLC
- Applicant Address: US CA San Jose
- Assignee: DUNAN SENSING, LLC
- Current Assignee: DUNAN SENSING, LLC
- Current Assignee Address: US CA San Jose
- Agency: Hackler Daghighian Martino & Novak
- Main IPC: G01L7/00
- IPC: G01L7/00 ; B81B7/00 ; B81C1/00 ; G01L19/14

Abstract:
Systems and methods for packaging a MEMS device to measure the in-stream pressure within a pipe are provided. Embodiments herein avoid the use of a metal housing enclosing the MEMS device or die pad of the MEMS device. Instead, the MEMS device is mounted directly to the pipe using a ceramic carrier. In preferred embodiments, the ceramic carrier is soldered, brazed, welded or eutectic bonded to the metal pipe.
Public/Granted literature
- US20170190570A1 METHODS FOR MOUNTING A MEMS SENSOR FOR IN-STREAM MEASUREMENTS Public/Granted day:2017-07-06
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