Invention Grant
- Patent Title: Method for forming micro-electro-mechanical system (MEMS) beam structure
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Application No.: US13861620Application Date: 2013-04-12
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Publication No.: US09969613B2Publication Date: 2018-05-15
- Inventor: Michael T. Brigham , Christopher V. Jahnes , Cameron E. Luce , Jeffrey C. Maling , William J. Murphy , Anthony K. Stamper , Eric J. White
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran Cole & Celderon, P.C.
- Agent Steven Meyers; Andrew M. Calderon
- Main IPC: B81C1/00
- IPC: B81C1/00 ; G06F17/50 ; B81B3/00
Abstract:
Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are disclosed. The method includes forming a Micro-Electro-Mechanical System (MEMS) beam structure by venting both tungsten material and silicon material above and below the MEMS beam to form an upper cavity above the MEMS beam and a lower cavity structure below the MEMS beam.
Public/Granted literature
- US20140308771A1 MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCTURES Public/Granted day:2014-10-16
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