Invention Grant
- Patent Title: Sintered body
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Application No.: US15510136Application Date: 2015-11-18
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Publication No.: US09969652B2Publication Date: 2018-05-15
- Inventor: Toyohiko Yano , Katsumi Yoshida , Toru Tsunoura , Yuji Shigeyoshi
- Applicant: NIPPON YTTRIUM CO., LTD.
- Applicant Address: JP Omuta-Shi
- Assignee: NIPPON YITRIUM CO., LTD.
- Current Assignee: NIPPON YITRIUM CO., LTD.
- Current Assignee Address: JP Omuta-Shi
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2014-236303 20141121
- International Application: PCT/JP2015/082452 WO 20151118
- International Announcement: WO2016/080459 WO 20160526
- Main IPC: C04B35/50
- IPC: C04B35/50 ; C04B35/645 ; H01J37/32 ; H01L21/67
Abstract:
A sintered body of the present invention contains yttrium oxyfluoride. The yttrium oxyfluoride is preferably YOF and/or Y5O4F7. The sintered body of the present invention preferably contains 50% by mass or more of yttrium oxyfluoride. The sintered body of the present invention has a relative density of preferably 70% or more and an open porosity of preferably 10% or less. Furthermore, the sintered body of the present invention has a three-point bending strength of preferably 10 MPa or more and 300 MPa or less.
Public/Granted literature
- US20170305796A1 SINTERED BODY Public/Granted day:2017-10-26
Information query
