Invention Grant
- Patent Title: Sputtering target for magnetic recording medium, and process for producing same
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Application No.: US14383219Application Date: 2013-03-01
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Publication No.: US09970099B2Publication Date: 2018-05-15
- Inventor: Shin-Ichi Ogino , Yuichiro Nakamura
- Applicant: JX Nippon Mining & Metals Corporation
- Applicant Address: JP Tokyo
- Assignee: JX Nippon Mining & Metals Corporation
- Current Assignee: JX Nippon Mining & Metals Corporation
- Current Assignee Address: JP Tokyo
- Agency: Howson & Howson LLP
- Priority: JP2012-053785 20120309
- International Application: PCT/JP2013/055672 WO 20130301
- International Announcement: WO2013/133163 WO 20130912
- Main IPC: C23C14/34
- IPC: C23C14/34 ; C22C19/07 ; C22F1/10 ; G11B5/851

Abstract:
A sputtering target for a magnetic recording medium, wherein an average grain area of a B-rich phase is 90 μm2 or less. A process for producing a sputtering target for a magnetic recording medium, wherein an alloy cast ingot is subject to heat treatment, thereafter subject to primary rolling which includes at least one pass of cold rolling, thereafter subject to secondary rolling, and machined to prepare a target. The obtained sputtering target for a magnetic recording medium has few cracks in the B-rich phase and has a high leakage flux density, and by using this target, it is possible to stabilize the discharge during sputtering, suppress arcing which occurs from cracks in the B-rich phase, and suppress the generation of particles.
Public/Granted literature
- US20150027882A1 Sputtering Target for Magnetic Recording Medium, and Process for Producing Same Public/Granted day:2015-01-29
Information query
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