Invention Grant
- Patent Title: Pressure measuring device and pressure measuring method
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Application No.: US14733327Application Date: 2015-06-08
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Publication No.: US09970838B2Publication Date: 2018-05-15
- Inventor: Tomohide Minami
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Rothwell, Figg, Ernst & Manbeck, P.C.
- Priority: JP2014-133268 20140627
- Main IPC: G01L21/12
- IPC: G01L21/12 ; G01L9/02

Abstract:
Provided is a pressure measuring device including a first electric resistor that is exposed to gas; a second electric resistor that is exposed to gas and has the same structure as that of the first electric resistor; a first measuring unit that measures a first voltage drop generated across the first electric resistor; a second measuring unit that measures a second voltage drop generated across the second electric resistor; a third measuring unit that measures a third voltage drop generated across the first electric resistor; a calculating unit that calculates a correction value that corrects the third voltage drop, based on a difference between the first voltage drop and the second voltage drop; and an output unit that corrects the third voltage drop using the calculated correction value and outputs a pressure value according to the third voltage value after the correction.
Public/Granted literature
- US20150377732A1 PRESSURE MEASURING DEVICE AND PRESSURE MEASURING METHOD Public/Granted day:2015-12-31
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