Invention Grant
- Patent Title: Piezoelectric thin-film based flexible sensing device, method for fabrication thereof and method for operating the same
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Application No.: US14621126Application Date: 2015-02-12
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Publication No.: US09972723B2Publication Date: 2018-05-15
- Inventor: Mahmoud Al Ahmad , Irfan Saadat , Taryam Al Shamsi
- Applicant: United Arab Emirates University , Khalif University of Science and Technology
- Applicant Address: AE Al Ain AE Abu Dhabi
- Assignee: United Arab Emirates University,Khalifa University of Science and Technology
- Current Assignee: United Arab Emirates University,Khalifa University of Science and Technology
- Current Assignee Address: AE Al Ain AE Abu Dhabi
- Agency: Fitch, Even, Tabin & Flannery LLP
- Main IPC: H01L41/04
- IPC: H01L41/04 ; H01L29/84 ; G01L1/16 ; H01L29/24

Abstract:
A sensing device, a method for fabrication thereof, and a method for operating the same are disclosed. The sensing device includes a flexible substrate, a first metallization layer, a piezoelectric thin film layer, a second metallization layer, and an insulating layer. The first metallization layer forms at least a source region and at least a drain region. The piezoelectric thin film layer provides a channel region permitting passage of charge carriers between the source region and the drain region. The second metallization layer forms at least a gate electrode and regulates flow of charge carriers through the piezoelectric thin film layer. When subjected to an external force, the flow of charge carriers is modulated in response to a strain in the piezoelectric thin film layer. The force is measured as a correlation between the applied force and the modulation of the flow of charge carriers.
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Information query
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