Invention Grant
- Patent Title: Thin-film semiconductor body with electronmagnetic radiation outcoupling structures
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Application No.: US14927325Application Date: 2015-10-29
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Publication No.: US09972748B2Publication Date: 2018-05-15
- Inventor: Christian Leirer , Anton Vogl , Andreas Biebersdorf , Rainer Butendeich , Christian Rumbolz
- Applicant: OSRAM Opto Semiconductors GmbH
- Applicant Address: DE Regensburg
- Assignee: OSRAM OPTO SEMICONDUCTORS GMBH
- Current Assignee: OSRAM OPTO SEMICONDUCTORS GMBH
- Current Assignee Address: DE Regensburg
- Agency: Slater Matsil, LLP
- Priority: DE102011012928 20110303
- Main IPC: H01L33/20
- IPC: H01L33/20 ; H01L21/02 ; H01L33/00 ; H01L33/22

Abstract:
A method for producing a thin-film semiconductor body is provided. A growth substrate is provided. A semiconductor layer with funnel-shaped and/or inverted pyramid-shaped recesses is epitaxially grown onto the growth substrate. The recesses are filled with a semiconductor material in such a way that pyramid-shaped outcoupling structures arise. A semiconductor layer sequence with an active layer is applied on the outcoupled structures. The active layer is suitable for generating electromagnetic radiation. A carrier is applied onto the semiconductor layer sequence. At least the semiconductor layer with the funnel-shaped and/or inverted pyramid-shaped recesses is detached, such that the pyramid-shaped outcoupling structures are configured as projections on a radiation exit face of the thin-film semiconductor.
Public/Granted literature
- US20160049550A1 Method for Producing a Thin-Film Semiconductor Body and Thin-Film Semiconductor Body Public/Granted day:2016-02-18
Information query
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