Invention Grant
- Patent Title: Dummy bottom electrode in interconnect to reduce CMP dishing
-
Application No.: US15345928Application Date: 2016-11-08
-
Publication No.: US09985075B2Publication Date: 2018-05-29
- Inventor: Harry-Hak-Lay Chuang , Wen-Chun You
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L27/00
- IPC: H01L27/00 ; H01L27/24 ; H01L27/22 ; H01L43/08 ; H01L43/12 ; H01L23/522 ; H01L23/528 ; H01L23/532 ; H01L43/02 ; H01L45/00

Abstract:
The present disclosure relates an integrated circuit (IC). A plurality of metal layers is disposed within an inter-layer dielectric (ILD) material over the substrate. A memory cell is disposed over a first metal layer at a memory region and comprising a bottom electrode directly above a first metal line within the first metal layer and a top electrode separated from the bottom electrode by a resistance switching element. A dummy structure comprises a dummy bottom electrode arranged directly above a second metal line within the first metal layer at a logic region adjacent to the memory region.
Public/Granted literature
- US20170053967A1 DUMMY BOTTOM ELECTRODE IN INTERCONNECT TO REDUCE CMP DISHING Public/Granted day:2017-02-23
Information query
IPC分类: