Invention Grant
- Patent Title: Vertical transistor fabrication and devices
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Application No.: US15616197Application Date: 2017-06-07
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Publication No.: US09985115B2Publication Date: 2018-05-29
- Inventor: Brent A. Anderson , Bruce B. Doris , Seong-Dong Kim , Rajasekhar Venigalla
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Vazken Alexanian
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L29/66 ; H01L29/06 ; H01L21/8238 ; H01L29/04 ; H01L29/161 ; H01L29/167 ; H01L29/78 ; H01L29/08 ; H01L29/16

Abstract:
A method of fabricating a vertical field effect transistor including forming a first recess in a substrate; epitaxially growing a first drain from the first bottom surface of the first recess; epitaxially growing a second drain from the second bottom surface of a second recess formed in the substrate; growing a channel material epitaxially on the first drain and the second drain; forming troughs in the channel material to form one or more fin channels on the first drain and one or more fin channels on the second drain, wherein the troughs over the first drain extend to the surface of the first drain, and the troughs over the second drain extend to the surface of the second drain; forming a gate structure on each of the one or more fin channels; and growing sources on each of the fin channels associated with the first and second drains.
Public/Granted literature
- US20170271481A1 VERTICAL TRANSISTOR FABRICATION AND DEVICES Public/Granted day:2017-09-21
Information query
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