Invention Grant
- Patent Title: MEMS microphone with low pressure region between diaphragm and counter electrode
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Application No.: US14934340Application Date: 2015-11-06
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Publication No.: US09986344B2Publication Date: 2018-05-29
- Inventor: Alfons Dehe , Andreas Froemel
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Main IPC: H04R19/04
- IPC: H04R19/04 ; H04R7/08 ; H04R31/00 ; H04R19/00 ; B81B3/00 ; H04R23/00 ; H04R7/02 ; B81C1/00
Abstract:
A MEMS microphone includes a first diaphragm element, a counter electrode element, and a low pressure region between the first diaphragm element and the counter electrode element. The low pressure region has a pressure less than an ambient pressure.
Public/Granted literature
- US20160066099A1 MEMS Microphone with Low Pressure Region between Diaphragm and Counter Electrode Public/Granted day:2016-03-03
Information query
