Invention Grant
- Patent Title: Ultrasonic sensor
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Application No.: US14641752Application Date: 2015-03-09
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Publication No.: US09987663B2Publication Date: 2018-06-05
- Inventor: Chikara Kojima
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2014-046778 20140310; JP2015-037069 20150226
- Main IPC: B06B1/06
- IPC: B06B1/06 ; G10K11/00

Abstract:
An ultrasonic sensor includes a substrate on which an opening portion is formed; a vibration plate that is provided on the substrate so as to block the opening portion; and a piezoelectric element including a first electrode, a piezoelectric layer, and a second electrode that are stacked on an opposite side of the opening portion of the vibration plate, in which when a direction in which the first electrode, the piezoelectric layer, and the second electrode are stacked is set to be a Z direction, and a portion that is completely overlapped by the first electrode, the piezoelectric layer, and the second electrode in the Z direction is set to be an active portion, the plural active portions are provided so as to face the one opening portion, and a suppressing portion (column portion) that suppresses vibrations of the vibration plate is provided between the adjacent active portions.
Public/Granted literature
- US20150258573A1 ULTRASONIC SENSOR Public/Granted day:2015-09-17
Information query
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