Invention Grant
- Patent Title: Composite transducer apparatus and system for processing a substrate and method of constructing the same
-
Application No.: US14727116Application Date: 2015-06-01
-
Publication No.: US09987666B2Publication Date: 2018-06-05
- Inventor: John A. Korbler , Richard Novak
- Applicant: Akrion Systems, LLC
- Assignee: NAURA AKRION INC.
- Current Assignee: NAURA AKRION INC.
- Agency: The Belles Group, P.C.
- Main IPC: B08B3/12
- IPC: B08B3/12 ; B06B1/06 ; H04R17/00 ; H01L41/37 ; H01L41/18

Abstract:
An apparatus for processing articles with acoustic energy and a method of constructing a transducer that utilizes a composite of piezoelectric pillars. In one embodiment, the invention is a method of constructing a device for generating acoustic energy comprising: providing a layer of supporting material; positioning a piezoelectric material atop the layer of adhesive material; cutting the piezoelectric material into a plurality of pillars so that spaces exist between adjacent pillars; and filling the spaces with a resilient material to form a composite assembly.
Public/Granted literature
- US20150258583A1 COMPOSITE TRANSDUCER APPARATUS AND SYSTEM FOR PROCESSING A SUBSTRATE AND METHOD OF CONSTRUCTING THE SAME Public/Granted day:2015-09-17
Information query
IPC分类: