Invention Grant
- Patent Title: Micromechanical device and method for manufacturing a micromechanical device
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Application No.: US13917044Application Date: 2013-06-13
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Publication No.: US09988261B2Publication Date: 2018-06-05
- Inventor: Julian Gonska , Jochen Reinmuth , Kathrin Gutsche
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: DE102012209973 20120614
- Main IPC: B81B7/00
- IPC: B81B7/00 ; B81B3/00 ; B81C1/00 ; B81B7/02

Abstract:
A micromechanical device, in particular a sensor device, and a method for manufacturing a micromechanical device are provided. The micromechanical device has a housing, the housing including a first cavity, and the housing including a second cavity that is separate from the first cavity. The micromechanical device is configured in such a way that a predetermined first gas pressure prevails in the first cavity, and a predetermined second gas pressure which is reduced compared to the first gas pressure prevails in the second cavity. A heating element is situated in the area of the second cavity. The micromechanical device has a printed conductor, the heating element being heatable with the aid of the printed conductor.
Public/Granted literature
- US20130334622A1 MICROMECHANICAL DEVICE AND METHOD FOR MANUFACTURING A MICROMECHANICAL DEVICE Public/Granted day:2013-12-19
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