- Patent Title: Thin-film-forming material including a molybdenum imide compound
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Application No.: US15598398Application Date: 2017-05-18
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Publication No.: US09988411B2Publication Date: 2018-06-05
- Inventor: Hiroki Sato , Junji Ueyama
- Applicant: ADEKA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: ADEKA CORPORATION
- Current Assignee: ADEKA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Young & Thompson
- Priority: JP2012-253276 20121119
- Main IPC: C07C17/00
- IPC: C07C17/00 ; C07F11/00 ; C23C16/18 ; C23C16/44 ; C23C16/455 ; C07F17/00 ; C23C16/40

Abstract:
In the method of the present invention for producing a thin film, including introducing, onto a substrate, a vapor that has been obtained by vaporizing a thin-film-forming material including a molybdenum imide compound represented by the following formula (I) and that includes the molybdenum imide compound; and then forming a thin film including molybdenum on the substrate by decomposing and/or chemically reacting the molybdenum imide compound. (In the formula, R1 though R10 each represent a hydrogen atom or a linear or branched alkyl group having 1 to 5 carbon atoms, and R11 represents a linear or branched alkyl group having 1 to 8 carbon atoms.)
Public/Granted literature
- US20170253624A1 THIN-FILM-FORMING MATERIAL INCLUDING A MOLYBDENUM IMIDE COMPOUND Public/Granted day:2017-09-07
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