Invention Grant
- Patent Title: Transparent conducting indium doped tin oxide
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Application No.: US14292200Application Date: 2014-05-30
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Publication No.: US09988707B2Publication Date: 2018-06-05
- Inventor: Krishna K. Uprety , Khushroo H. Lakdawala , Russell Shellenberger , Mahmood Ahmad Ali
- Applicant: PPG INDUSTRIES OHIO, INC.
- Applicant Address: US OH Cleveland
- Assignee: PPG INDUSTRIES OHIO, INC.
- Current Assignee: PPG INDUSTRIES OHIO, INC.
- Current Assignee Address: US OH Cleveland
- Agency: Lewis Roca Rothgerber Christie LLP
- Main IPC: C23C14/34
- IPC: C23C14/34 ; C23C14/08

Abstract:
A method of manufacturing indium tin oxide includes sputtering indium and tin from a target onto a substrate, the sputtering including moving the target along a path over the substrate. The indium tin oxide may have a sheet resistance less than 0.5 Ω/□. An indium film includes: a first moving target sputtered indium tin oxide layer; a second moving target sputtered indium tin oxide layer on the first moving target sputtered indium tin oxide layer; and a third moving target sputtered indium tin oxide layer on the second moving target sputtered indium tin oxide layer. A transparency includes the indium tin oxide, and a flying vehicle includes the transparency.
Public/Granted literature
- US20150345006A1 TRANSPARENT CONDUCTING INDIUM DOPED TIN OXIDE Public/Granted day:2015-12-03
Information query
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