Invention Grant
- Patent Title: Substrate processing apparatus
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Application No.: US14997684Application Date: 2016-01-18
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Publication No.: US09988717B2Publication Date: 2018-06-05
- Inventor: Manabu Honma
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Nath, Goldberg & Meyer
- Agent Jerald L. Meyer
- Priority: JP2015-012654 20150126
- Main IPC: C23C16/455
- IPC: C23C16/455

Abstract:
There is provided a substrate processing apparatus which supplies a processing gas onto a surface of a substrate on a substrate mounting table from a gas nozzle. The apparatus includes: a ring member installed in a leading end side of to the gas nozzle rather than a through-hole and including an inner peripheral surface on which the gas nozzle inserted into the through-hole is mounted, at least one of contours of an outer peripheral surface and the inner peripheral surface being set to a spiral curve or a polygon obtained by linearly approximating the curve; and a pedestal part on which the ring member is mounted at left and right positions spaced apart from each other in a circumference direction of the ring member. A height of a position at which the gas nozzle is supported by the ring member is adjusted with a rotation of the ring member.
Public/Granted literature
- US20160215395A1 SUBSTRATE PROCESSING APPARATUS Public/Granted day:2016-07-28
Information query
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