Invention Grant

Monitoring device
Abstract:
A monitoring device for monitoring power consumption of a magnetic bearing vacuum pump rotatably driven by a motor and configured such that a rotor is magnetically levitated and supported by a magnetic bearing, comprises: a calculator configured to calculate the power consumption of the magnetic bearing vacuum pump, the power consumption of the magnetic bearing vacuum pump being obtained by adding power consumption of the motor based on a motor rotational speed and a motor current value and power consumption of the magnetic bearing together; and a display controller configured to display, on a display device, the power consumption of the magnetic bearing vacuum pump calculated by the calculator.
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