Invention Grant
- Patent Title: Multilevel pressure sensor
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Application No.: US15103107Application Date: 2014-11-14
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Publication No.: US09989431B2Publication Date: 2018-06-05
- Inventor: Andreas Rossberg , Olaf Textor , Elmar Wosnitza
- Applicant: Endress + Hauser GmbH + Co. KG
- Applicant Address: DE Maulburg
- Assignee: ENDRESS + HAUSER GMBH + CO. KG
- Current Assignee: ENDRESS + HAUSER GMBH + CO. KG
- Current Assignee Address: DE Maulburg
- Agency: Bacon & Thomas, PLLC
- Priority: DE102013113843 20131211
- International Application: PCT/EP2014/074581 WO 20141114
- International Announcement: WO2015/086254 WO 20150618
- Main IPC: G01L9/00
- IPC: G01L9/00

Abstract:
A pressure sensor comprises a deformable measuring diaphragm, and a mating body connected in a pressure-tight manner and forms a measuring chamber in which a reference pressure is present. A pressure can be applied to an outside of the measuring diaphragm. The pressure sensor has a capacitive transducer having at least one mating body electrode and at least one diaphragm electrode. Above a pressure limit value for the pressure, at least one central surface section of the measuring diaphragm rests against the mating body with a contact surface area, the size of which is dependent on the pressure. The pressure sensor also has a resistive transducer for converting a pressure-dependent deformation of the measuring diaphragm, when pressed in a range of values above the pressure limit value, into an electrical signal using an electrical resistance which is dependent on the contact surface area of the measuring diaphragm on the mating body.
Public/Granted literature
- US20160305836A1 Pressure Sensor Public/Granted day:2016-10-20
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