Invention Grant
- Patent Title: Positive photosensitive resin composition, cured film formed by curing same, and optical device equipped with same
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Application No.: US14902411Application Date: 2014-07-01
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Publication No.: US09989852B2Publication Date: 2018-06-05
- Inventor: Keiichi Uchida , Masao Kamogawa , Mitsuhito Suwa , Chika Taniguchi
- Applicant: TORAY INDUSTRIES, INC.
- Applicant Address: JP Tokyo
- Assignee: TORAY INDUSTRIES, INC.
- Current Assignee: TORAY INDUSTRIES, INC.
- Current Assignee Address: JP Tokyo
- Agency: RatnerPrestia
- Priority: JP2013-138754 20130702
- International Application: PCT/JP2014/067507 WO 20140701
- International Announcement: WO2015/002183 WO 20150108
- Main IPC: G03F7/023
- IPC: G03F7/023 ; G03F7/075 ; G03F7/039 ; G03F7/22 ; H01L21/02 ; H01L27/146 ; C08G77/14 ; C09D183/06 ; H01L21/311 ; G03F7/022 ; H01L21/027 ; G03F7/004
Abstract:
A positive photosensitive resin composition including: a polysiloxane synthesized by hydrolyzing and partially condensing a specific organosilane and an organosilane that has a carboxyl group and/or a dicarboxylic acid anhydride structure; particles of one or more metal compounds selected from an aluminum compound, a tin compound, a titanium compound, and a zirconium compound, or composite particles of a silicon compound and one or more metal compounds selected from an aluminum compound, a tin compound, a titanium compound, and a zirconium compound; a naphthoquinone diazide compound; and a solvent.
Public/Granted literature
Information query
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