- Patent Title: Photosensitive resin composition for projection exposure, photosensitive element, method for forming resist pattern, process for producing printed wiring board and process for producing lead frame
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Application No.: US14906595Application Date: 2014-07-22
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Publication No.: US09989854B2Publication Date: 2018-06-05
- Inventor: Masakazu Kume , Momoko Munakata
- Applicant: HITACHI CHEMICAL COMPANY, LTD.
- Applicant Address: JP Tokyo
- Assignee: HITACHI CHEMICAL COMPANY, LTD.
- Current Assignee: HITACHI CHEMICAL COMPANY, LTD.
- Current Assignee Address: JP Tokyo
- Agency: Fitch, Even, Tabin & Flannery, LLP
- Priority: JP2013-152563 20130723
- International Application: PCT/JP2014/069353 WO 20140722
- International Announcement: WO2015/012272 WO 20150129
- Main IPC: G03F7/04
- IPC: G03F7/04 ; G03F7/40 ; G03F7/11 ; H01L21/027 ; G03F7/38 ; H01L21/033 ; G03F7/027 ; H05K3/10 ; G03F7/033 ; C23C18/16 ; G03F7/031 ; G03F7/20 ; G03F7/32

Abstract:
An object of the present invention is to provide a photosensitive resin composition for projection exposure capable of forming a resist pattern that is excellent in adhesion, resolution, and inhibitory properties against the occurrence of resist footing, and the present invention provides a photosensitive resin composition for projection exposure comprising (A) a binder polymer; (B) a photopolymerizable compound having an ethylenically unsaturated bond; (C) a photopolymerization initiator; and (D) a sensitizing dye, wherein the (B) photopolymerizable compound having an ethylenically unsaturated bond comprises a (meth)acrylate compound having a skeleton derived from dipentaerythritol and a compound represented by the following formula (III): wherein R8, R9, R10, and R11 each independently represent a hydrogen atom or a methyl group, X and Y each independently represent an ethylene group or a propylene group, p1, p2, q1, and q2 each independently represent a numerical value of 0 to 9, both p1+q1 and p2+q2 are 1 or more, and p1+q1+p2+q2 is 2 to 9.
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