Invention Grant
- Patent Title: Chemical supply unit capable of automatically replacing a canister and a substrate treatment apparatus having the same
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Application No.: US15401800Application Date: 2017-01-09
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Publication No.: US09989855B2Publication Date: 2018-06-05
- Inventor: Sungmin Jang , Su-Hwan Kim , Dai-Hee Lee
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si, Gyeonggi-Do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si, Gyeonggi-Do
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2016-0019313 20160218
- Main IPC: H01L21/027
- IPC: H01L21/027 ; B25J11/00 ; F17C13/08 ; G03F7/16 ; B67D7/84 ; H01L21/67 ; B67D7/02 ; B65D47/04 ; B67D1/08
Abstract:
A substrate treatment apparatus includes a substrate treatment unit configured to provide a chemical solution to a substrate to treat the substrate, and a chemical supply unit configured to supply the chemical solution to the substrate treatment unit. The chemical supply unit includes a loader configured to load a canister containing the chemical solution to the chemical supply unit, a clamp configured to clamp the canister in place, a chemical supply line through which the chemical solution is supplied to the substrate treatment unit, and a coupler configured to couple the chemical supply line to the canister. The chemical supply unit is capable of automatically replacing the canister and the substrate.
Public/Granted literature
Information query
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