A workpiece processing system and method to process a workpiece in processing chambers in order, in which even if processing duration varies at any chamber, such a variation does not affect the processing of the workpiece in other chambers. Each chamber performs processing of a workpiece in a predetermined order; a conveyor that conveys a workpiece to a next chamber; and a control device controls at least a start time of predetermined processing at each processing chamber. The control device sets: predetermined representative processing at a first chamber as a reference processing step, start time of the reference processing step as control start time, necessary processing duration specific to each chamber, necessary conveyance duration required to convey a workpiece between the chambers, and controls starting of the representative processing at each chamber while considering the control start time as origination.