Invention Grant
- Patent Title: Substrate treatment method and substrate treatment device
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Application No.: US14912722Application Date: 2014-08-20
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Publication No.: US09991137B2Publication Date: 2018-06-05
- Inventor: Tatsuya Fujii
- Applicant: SCREEN Holdings Co., Ltd.
- Applicant Address: JP
- Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee Address: JP
- Agency: Ostrolenk Faber LLP
- Priority: JP2013-170612 20130820
- International Application: PCT/JP2014/071779 WO 20140820
- International Announcement: WO2015/025889 WO 20150226
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/02 ; H01L21/306 ; H01L21/687

Abstract:
This substrate processing method includes: a substrate rotating step of rotating a substrate around a predetermined vertical axis line at a first rotation speed; a liquid-tight step performed along with the substrate rotating step, and where a first opposed surface is opposed at a first distance to a rotated lower surface of the substrate, and at the same time, a processing liquid is discharged from a processing liquid dispense port of a lower surface nozzle opposed to the lower surface of the substrate to cause a space between the lower surface and the first opposed surface to be in a liquid-tight state by the processing liquid; and a liquid-tight state releasing step of releasing the liquid-tight state in the space between the lower surface and the first opposed surface by separating the lower surface and the first opposed surface after the liquid-tight step.
Public/Granted literature
- US20160204006A1 SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT DEVICE Public/Granted day:2016-07-14
Information query
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