Invention Grant
- Patent Title: Semiconductor device
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Application No.: US15333193Application Date: 2016-10-25
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Publication No.: US09991353B2Publication Date: 2018-06-05
- Inventor: Tatsuya Naito
- Applicant: FUJI ELECTRIC CO., LTD.
- Applicant Address: JP Kanagawa
- Assignee: FUJI ELECTRIC CO., LTD.
- Current Assignee: FUJI ELECTRIC CO., LTD.
- Current Assignee Address: JP Kanagawa
- Priority: JP2015-236999 20151203
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/423 ; H01L23/528 ; H01L29/06 ; H01L29/417 ; H01L29/739 ; H01L29/40

Abstract:
Machining accuracy of an IGBT region is worsened due to a height difference caused by polysilicon. Therefore, there is a problem that characteristic variation of the IGBT increases. Provided is a semiconductor device including a semiconductor substrate; a gate wiring layer provided on a front surface side of the semiconductor substrate; and a gate structure that includes a gate electrode and is provided on the front surface of the semiconductor substrate. The gate wiring layer includes an outer periphery portion that is a metal wiring layer and is provided along an outer periphery of the semiconductor substrate; and an extending portion that is a metal wiring layer, is provided extending from the outer periphery portion toward a central portion of the semiconductor substrate, and is electrically connected to the gate electrode.
Public/Granted literature
- US20170162662A1 SEMICONDUCTOR DEVICE Public/Granted day:2017-06-08
Information query
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