Invention Grant
- Patent Title: Trench FET with ruggedness enhancement regions
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Application No.: US13793926Application Date: 2013-03-11
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Publication No.: US09991377B2Publication Date: 2018-06-05
- Inventor: Ashita Mirchandani , Timothy D. Henson , Ling Ma , Niraj Ranjan
- Applicant: Infineon Technologies Americas Corp.
- Applicant Address: US CA El Segundo
- Assignee: Infineon Technologies Americas Corp.
- Current Assignee: Infineon Technologies Americas Corp.
- Current Assignee Address: US CA El Segundo
- Agency: Murphy, Bilak & Homiller, PLLC
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/06 ; H01L29/10 ; H01L29/417

Abstract:
According to an exemplary implementation, a field-effect transistor (FET) includes first and second gate trenches extending to a drift region of a first conductivity type. The FET also includes a base region of a second conductivity type that is situated between the first and second gate trenches. A ruggedness enhancement region is situated between the first and second gate trenches, where the ruggedness enhancement region is configured to provide an enhanced avalanche current path from a drain region to the base region when the FET is in an avalanche condition. The enhanced avalanche current path is away from the first and second gate trenches. The ruggedness enhancement region can be of the second conductivity type that includes a higher dopant concentration than the base region. Furthermore, the ruggedness enhancement region can be extending below the first and second gate trenches.
Public/Granted literature
- US20130264636A1 Trench FET with Ruggedness Enhancement Regions Public/Granted day:2013-10-10
Information query
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