Invention Grant
- Patent Title: MEMS component and method for the production thereof
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Application No.: US14420871Application Date: 2013-08-01
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Publication No.: US09991822B2Publication Date: 2018-06-05
- Inventor: Pirmin Hermann Otto Rombach
- Applicant: EPCOS AG
- Applicant Address: JP Tokyo
- Assignee: TDK Corporation
- Current Assignee: TDK Corporation
- Current Assignee Address: JP Tokyo
- Agency: Nixon Peabody LLP
- Priority: DE102012107457 20120814
- International Application: PCT/EP2013/066208 WO 20130801
- International Announcement: WO2014/026857 WO 20140220
- Main IPC: H02N1/08
- IPC: H02N1/08 ; B81B3/00
Abstract:
The invention proposes a MEMS component having a crystalline base body (GK), a recess (AN) and a structured assembly (A) which closes said recess, in which an opening (OG) is structured in a first functional layer (MN), the effective opening cross section thereof varying as a function of the pressure difference on the two sides of the first functional layer (MN).
Public/Granted literature
- US20150207435A1 MEMS Component And Method For The Production Thereof Public/Granted day:2015-07-23
Information query
