Invention Grant
- Patent Title: Piezoelectric acoustic resonator with adjustable temperature compensation capability
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Application No.: US14425076Application Date: 2013-08-21
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Publication No.: US09991867B2Publication Date: 2018-06-05
- Inventor: Hao Zhang , Liangzhen Du , Wei Pang , Jianbang Li , Nianchu Hu , Kai Kang
- Applicant: ZTE CORPORATION , TIANJIN UNIVERSITY
- Applicant Address: CN Shenzhen, Guangdong CN Tianjin
- Assignee: ZTE Corporation,TIANJIN University
- Current Assignee: ZTE Corporation,TIANJIN University
- Current Assignee Address: CN Shenzhen, Guangdong CN Tianjin
- Agency: Ling and Yang Intellectual Property
- Agent Ling Wu; Stephen Yang
- Priority: CN201210314229 20120830
- International Application: PCT/CN2013/081943 WO 20130821
- International Announcement: WO2013/185737 WO 20131219
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H01L41/047 ; H01L41/18

Abstract:
A piezoelectric acoustic resonator with an adjustable temperature compensation capability is disclosed. The piezoelectric acoustic resonator includes: a piezoelectric acoustic reflection structure, a first electrode, a second electrode, a piezoelectric layer between the first electrode and the second electrode, and a temperature compensation layer; wherein the temperature compensation layer is a single-layer temperature compensation layer formed of SixOy material, or a composite temperature compensation layer formed by stacking material with a positive temperature coefficient of sound velocity and material with a negative temperature coefficient of sound velocity; and the temperature compensation layer is configured to: perform reverse compensation for a temperature frequency shift caused by the first electrode, the piezoelectric layer and the second electrode in the piezoelectric acoustic resonator; wherein x:y is not equal to 1:2.
Public/Granted literature
- US20150263697A1 Piezoelectric Acoustic Resonator with Adjustable Temperature Compensation Capability Public/Granted day:2015-09-17
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