Invention Grant
- Patent Title: Microacoustic component and method for the production thereof
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Application No.: US14773290Application Date: 2014-02-20
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Publication No.: US09991873B2Publication Date: 2018-06-05
- Inventor: Gudrun Henn , Bernhard Bader
- Applicant: Snaptrack Inc.
- Applicant Address: US CA San Diego
- Assignee: SnapTrack, Inc.
- Current Assignee: SnapTrack, Inc.
- Current Assignee Address: US CA San Diego
- Agency: Patterson & Sheridan, L.L.P. Qualcomm
- Priority: DE102013102217 20130306
- International Application: PCT/EP2014/053350 WO 20140220
- International Announcement: WO2014/135379 WO 20140912
- Main IPC: H03H3/02
- IPC: H03H3/02 ; H03H9/25 ; H03H3/08 ; H03H9/02 ; H03H9/10 ; H01L41/331 ; H01L41/332 ; H03H9/145 ; H03H9/05
Abstract:
A microacoustic component includes a functional acoustic region, an inner marginal region and an outer marginal region. The cover covers the functional acoustic region and has a thin film and a bearing surface. The inner marginal region is acoustically coupled to the functional acoustic region and the bearing surface bears directly at least on a part of the inner marginal region.
Public/Granted literature
- US20160020749A1 Microacoustic Component and Method for the Production Thereof Public/Granted day:2016-01-21
Information query
