Invention Application
- Patent Title: ARTICLE, METHOD, AND APPARATUS FOR ELECTROCHEMICAL FABRICATION
- Patent Title (English): Article, method, and apparatus for electrochemical fabrication
- Patent Title (中): 电化学制造的文章,方法和装置
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Application No.: PCT/US1998/006591Application Date: 1998-04-03
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Publication No.: WO98045504A1Publication Date: 1998-10-15
- Main IPC: B81C1/00
- IPC: B81C1/00 ; B21C37/00 ; C23F1/00 ; C25D20060101 ; C25D1/00 ; C25D1/10 ; C25D5/02 ; C25D5/10 ; C25D7/12 ; C25D17/06 ; C25D19/00 ; C25D21/12 ; H01L21/288 ; H05K3/24
Abstract:
An electroplating method that includes: a) contacting a first substrate (2) with a first electroplating article (4), which includes a support and a conformable mask disposed in a pattern on the support; b) electroplating a first metal from an electroplating bath (58) which is a source of metal ions onto the first substrate in a first pattern, the first pattern corresponding to the complement of the conformable mask pattern; and c) removing the first article from the first substrate, is disclosed. The method may be used in the microfabrication of miniaturized devices. Electroplating articles and electroplating apparatus are also disclosed.
Information query