Invention Application
- Patent Title: METHOD FOR REDUCING VARIATIONS IN ARRAYS OF MICRO-MACHINED CANTILEVER STRUCTURES USING ION IMPLANTATION
- Patent Title (中): 用离子注入减少微机械悬臂结构阵列变化的方法
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Application No.: PCT/US0031358Application Date: 2000-11-15
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Publication No.: WO0136319A8Publication Date: 2001-09-27
- Inventor: VILLANI THOMAS STEPHEN , GOODMAN LAWRENCE A
- Applicant: SARNOFF CORP
- Assignee: SARNOFF CORP
- Current Assignee: SARNOFF CORP
- Priority: US16546399 1999-11-15; US71210900 2000-11-14
- Main IPC: B81B3/00
- IPC: B81B3/00 ; B81C1/00 ; G01J5/40
Abstract:
A method of adjusting the position of a micro-mechanical bi-material cantilever is provided. The bi-material includes a first and a second material and each material has a corresponding thermal expansion coefficient. The method includes implanting ions predominantly into one material of the bi-material to modify internal stress in one of the first and second materials relative to the other material. The deformation of the bi-material is then detected to modulate the implantation of ions thereto.
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