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    SIMULTANEOUS PHASE-SHIFTING FIZEAU INTERFEROMETER
    1.
    发明申请
    SIMULTANEOUS PHASE-SHIFTING FIZEAU INTERFEROMETER 审中-公开
    同步相移FIZEAU干涉仪

    公开(公告)号：WO2006080923A1

    公开(公告)日：2006-08-03

    申请号：PCT/US2005/002923

    申请日：2005-01-27

    Applicant: 4D TECHNOLOGY CORPORATION ,  MILLERD, James, E. ,  WYANT, James, C.

    Inventor： MILLERD, James, E. ,  WYANT, James, C.

    IPC: G01B9/02

    CPC classification number: G01J9/02 ,  G01B9/02032 ,  G01B9/02057 ,  G01B9/02065 ,  G01B9/0209 ,  G01B2290/45 ,  G01B2290/70 ,  G01J2009/0292

    Abstract: The tilted relationship between the reference and test mirrors (24,26) of a Fizeau interferometer is used to spatially separate the reflections (R,T) from the two surfaces. The separate beams (R, T) are filtered through a spatial polarization element (32) that provides different states of polarization to the beams. The beams (R,T) are subsequently recombined to form a substantially collinear beam that is processed using a spatial-phase-shift interferometer (44) that permits quantitative phase measurement in a single video frame. Alternatively, two beams (104,106) with orthogonal polarization are injected into the Fizeau cavity (20) at different angles, such that after reflection from the reference and test optics (24,26) they are substantially collinear. Unwanted reflections are blocked at the focal plane through the use of a circular aperture (112). Short coherence length light and a delay line (84) may be used to mitigate stray reflections, reduce measurement integration times, and implement temporal phase averaging.

    Abstract translation: 使用Fizeau干涉仪的参考和测试镜（24,26）之间的倾斜关系在空间上分离两个表面的反射（R，T）。 单独的光束（R，T）通过空间偏振元件（32）被滤波，该空间偏振元件（32）向光束提供不同的偏振状态。 光束（R，T）随后重新组合以形成使用允许在单个视频帧中进行定量相位测量的空间相移干涉仪（44）来处理的基本上共线的光束。 或者，具有正交偏振的两个光束（104,106）以不同的角度注入到Fizeau腔（20）中，使得在来自参考和测试光学器件（24,26）的反射之后，它们基本上共线。 不需要的反射通过使用圆形孔径（112）在焦平面处被阻挡。 短相干长度光和延迟线（84）可用于减轻杂散反射，减少测量积分时间，并实现时间相位平均。

    SYNCHRONOUS FREQUENCY-SHIFT MECHANISM IN FIZEAU INTERFEROMETER
    2.
    发明申请
    SYNCHRONOUS FREQUENCY-SHIFT MECHANISM IN FIZEAU INTERFEROMETER 审中-公开
    FIZEAU干扰仪同步频移机构

    公开(公告)号：WO2008030580A2

    公开(公告)日：2008-03-13

    申请号：PCT/US2007/019579

    申请日：2007-09-07

    Applicant: 4D TECHNOLOGY CORPORATION ,  MILLERD, James, E. ,  NORTH-MORRIS, Michael

    Inventor： MILLERD, James, E. ,  NORTH-MORRIS, Michael

    IPC: G01B9/02

    CPC classification number: G01B9/02057 ,  G01B9/02002 ,  G01B9/02045 ,  G01B9/02065 ,  G01B9/0209 ,  G01B2290/70

    Abstract: An optical device for characterizing a test surface (26) combines a Fizeau interferometer with a polarization frequency-shifting element (10). Two substantially collinear, orthogonally polarized beams (12,13) having respective frequencies differing by a predetermined frequency shift are generated by the polarization frequency-shifting element (10) and projected into the Fizeau optical cavity (24) to produce a pair of test beams (33,34) and a pair of reference beams (31,32), wherein the beams in each pair have orthogonal polarization states and have frequencies differing by the predetermined frequency shift. A second, substantially equal frequency shift is introduced in the Fizeau cavity (24) on either one of the pairs of test and reference beams, thereby generating a four-beam collinear output that produces an interf erogram without tilt or short-coherence light. The invention may also be implemented by reversing the order of the Fizeau cavity (24) and the polarization frequency-shifting element (10) in the optical train.

    Abstract translation: 用于表征测试表面（26）的光学装置将Fizeau干涉仪与偏振频移元件（10）组合。 通过偏振频移元件（10）产生两个基本上共线的正交偏振光束（12,13），该正交偏振光束（12,13）具有不同频率的预定频移，并投射到菲索光学腔（24）中，以产生一对测试光束 （33,34）和一对参考光束（31,32），其中每对中的光束具有正交偏振状态并且具有与预定频移不同的频率。 在Fossau空腔（24）中的任何一对测试和参考光束上引入第二个基本上相等的频移，从而产生四光束共线输出，其产生无倾斜或短相干光的界面图。 本发明还可以通过使光纤列中的菲索空腔（24）和极化频移元件（10）的顺序颠倒来实现。

    PIXELATED PHASE-MASK INTERFEROMETER
    3.
    发明申请
    PIXELATED PHASE-MASK INTERFEROMETER 审中-公开
    像相屏蔽测温仪

    公开(公告)号：WO2005052502A2

    公开(公告)日：2005-06-09

    申请号：PCT/US2004/038891

    申请日：2004-11-18

    Applicant: 4D TECHNOLOGY CORPORATION ,  BROCK, Neal, J. ,  MILLERD, James, E. ,  WYANT, James, C ,  HAYES, John, B.

    Inventor： BROCK, Neal, J. ,  MILLERD, James, E. ,  WYANT, James, C ,  HAYES, John, B.

    IPC: G01B

    CPC classification number: G01B9/02022 ,  G01B9/02057 ,  G01B9/02081 ,  G01B9/02083 ,  G01B2290/70

    Abstract: A phase-difference sensor (10) measures the spatially resolved difference in phase between orthogonally polarized reference (R) and test (T) wavefronts. The sensor (10) is constructed as a pixelated phase-mask (14) aligned to and imaged on a pixelated detector array (16). Each adjacent pixel of the phase-mask (14) measures a predetermined relative phase shift between the orthogonally polarized reference and test beams (R,T). Thus, multiple phase-shifted interferograms can be synthesized at the same time by combining pixels with identical phase-shifts. The multiple phase-shifted interferograms can be combined to calculate standard parameters such as modulation index or average phase step. Any configuration of interferometer that produces orthogonally polarized reference and object beams (R,T) may be combined with the phase-difference sensor (10) of the invention to provide, single-shot, simultaneous phase-shifting measurements.

    Abstract translation: 相位差传感器（10）测量正交偏振参考（R）和测试（T）波前之间的空间上的相位差。 传感器（10）被构造为与像素化检测器阵列（16）对准并成像在像素化检测器阵列（16）上的像素化​​相位掩模（14）。 相位掩模（14）的每个相邻像素测量正交偏振的参考光束和测试光束（R，T）之间的预定的相对相移。 因此，通过组合具有相同相移的像素，可以同时合成多个相移干涉图。 可以组合多个相移干涉图以计算标准参数，例如调制指数或平均相位步长。 可以将产生正交偏振的参考物体和物体光束（R，T）的干涉仪的任何构造与本发明的相位差传感器（10）组合，以提供单次同时相移测量。

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