公开(公告)号：WO2005065246A3

公开(公告)日：2006-01-05

申请号：PCT/US2004043129

申请日：2004-12-17

Applicant: KLA TENCOR TECH CORP ,  VAEZ-IRAVANI MEHDI ,  ZHAO GUOHENG ,  STOWKOWSKI STANLEY E

Inventor： VAEZ-IRAVANI MEHDI ,  ZHAO GUOHENG ,  STOWKOWSKI STANLEY E

IPC: G02B6/00 ,  G02B6/04 ,  G02B6/32 ,  G02B27/48

CPC classification number: G02B27/48 ,  G02B6/0001 ,  G02B6/04

Abstract: Disclosed are apparatus and methods for illuminating a sample,

Abstract translation: 公开了用于照亮样品的装置和方法，

公开(公告)号：WO2005065246A2

公开(公告)日：2005-07-21

申请号：PCT/US2004/043129

申请日：2004-12-17

Applicant: KLA- TENCOR TECHNOLOGIES CORPORATION ,  VAEZ-IRAVANI, Mehdi ,  ZHAO, Guoheng ,  STOWKOWSKI, Stanley E.

Inventor： VAEZ-IRAVANI, Mehdi ,  ZHAO, Guoheng ,  STOWKOWSKI, Stanley E.

IPC: G02B6/00 ,  G02B6/04 ,  G02B6/32 ,  G02B27/48

CPC classification number: G02B27/48 ,  G02B6/0001 ,  G02B6/04

Abstract: Disclosed are apparatus and methods for illuminating a sample, e.g. , during an inspection of such sample for defects. In one aspect, the illumination apparatus includes a bundle of fibers that each have a first end and a second end. The illumination apparatus further includes an illumination selector for selectively transmitting one or more incident beams into one or more corresponding first ends of the optical fibers so that the selected one or more incident beams are output from one or more corresponding second ends of the fibers. The illumination apparatus also includes a lens arrangement for receiving the selected one or more incidents beams output from the corresponding one or more second ends of the fibers and directing the selected one or more incident beams towards the sample. The lens arrangement and the fibers are arranged with respect to each other so as to image an imaging plane of the sample at the second ends of the fibers. In one aspect, the incident beams are laser beams. In a specific application of the invention, the sample is selected from a group consisting of a semiconductor device, a semiconductor wafer, and a semiconductor reticle.

Abstract translation: 公开了用于照亮样品的装置和方法，例如在检查这种样品的缺陷时。 一方面，照明装置包括一束纤维，每束纤维具有第一端和第二端。 照明装置还包括照明选择器，用于选择性地将一个或多个入射光束传输到光纤的一个或多个对应的第一端中，使得所选择的一个或多个入射光束从光纤的一个或多个对应的第二端输出。 照明设备还包括透镜装置，用于接收从光纤的对应的一个或多个第二端输出的所选择的一个或多个事件光束，并将所选择的一个或多个入射光束引向样品。 透镜布置和光纤相对于彼此布置，以便在纤维的第二端成像样品的成像平面。 一方面，入射光束是激光束。 在本发明的具体应用中，样品选自半导体器件，半导体晶片和半导体掩模版。