Abstract:
Chip-Scale Sensorchip-Packung, aufweisend: einen Sensorchip, mit einer ersten Oberfläche und einer gegenüberliegenden ersten Unterfläche, aufweisend: eine Sensorvorrichtung, die neben der ersten Oberfläche gebildet ist, und eine Vielzahl von leitfähigen Pads, die neben der ersten Oberfläche und angrenzend zu der Sensorvorrichtung gebildet sind; eine Vielzahl von ersten Durchgangslöchern, die an der ersten Unterfläche gebildet sind, wobei jedes der ersten Durchgangslöcher dessen korrespondierende leitfähige Pad freilegt; eine Vielzahl von leitfähigen Strukturen, die an der ersten Unterfläche gebildet sind; und eine Umverteilungsschicht, welche die erste Unterfläche und die ersten Durchgangslöcher überlagert, um eine Verbindung zu jedem der leitfähigen Pads und jeder der leitfähigen Strukturen herzustellen; eine Abstandsschicht, welche die Sensorvorrichtung umgibt, die am Sensorchip gebildet ist, wobei die Abstandsschicht eine zweite Oberfläche und eine zweite gegenüberliegende Unterfläche und eine Öffnung durch die zweite Oberfläche und die zweite Unterfläche aufweist, und die Innenwand der Öffnung in eine vorbestimmten Abstand d (d > 0) zu der Sensorvorrichtung verbleibt; und eine erste Klebeschicht im Sandwich zwischen der zweiten Unterfläche der Abstandsschicht und der ersten Oberfläche des Sensorchips.
Abstract:
An embodiment of the invention provides a chip package, which includes: a semiconductor substrate having a device region; a package layer disposed on the semiconductor substrate; a spacing layer disposed between the semiconductor substrate and the package layer and surrounding the device region; and an auxiliary pattern having a hollow pattern formed in the spacing layer, a material pattern located between the spacing layer and the device region, or combinations thereof.
Abstract:
An embodiment of the invention provides a chip package, which includes a substrate (100) having an upper surface and a lower surface, a chip (102) disposed in or on the substrate, a pad (104) disposed in or on the substrate and electrically connected to the chip, a hole extending from the lower surface toward the upper surface, exposing the pad, wherein a lower opening of the hole near the lower surface has a width that is shorter than that of an upper opening of the hole near the upper surface, an insulating layer (114a) located overlying a sidewall of the hole, and a conducting layer (116) located overlying the insulating layer and electrically connected to the pad.
Abstract:
An embodiment of the invention provides a chip package including a semiconductor substrate (100) having a first surface (100a) and a second surface (100b) opposite thereto. A dielectric layer (130) is overlying the first surface of the semiconductor substrate and comprises an opening exposing a conducting pad (150). A side recess (200) is on at least a first side of the semiconductor substrate, wherein the side recess extends from the first surface (100a) towards the second surface (100b). An upper recess is on at least a first side of the dielectric layer outside the conducting pad. A conducting layer is electrically connected to the conducting pad (150) and extends to the upper recess and the side recess.
Abstract:
An embodiment of the invention provides a chip package, which includes a substrate (100) having an upper surface and a lower surface, a chip (102) disposed in or on the substrate, a pad (104) disposed in or on the substrate and electrically connected to the chip, a hole extending from the lower surface toward the upper surface, exposing the pad, wherein a lower opening of the hole near the lower surface has a width that is shorter than that of an upper opening of the hole near the upper surface, an insulating layer (114a) located overlying a sidewall of the hole, and a conducting layer (116) located overlying the insulating layer and electrically connected to the pad.
Abstract:
An embodiment of the invention provides a chip package including a semiconductor substrate (100) having a first surface (100a) and a second surface (100b) opposite thereto. A dielectric layer (130) is overlying the first surface of the semiconductor substrate and comprises an opening exposing a conducting pad (150). A side recess (200) is on at least a first side of the semiconductor substrate, wherein the side recess extends from the first surface (100a) towards the second surface (100b). An upper recess is on at least a first side of the dielectric layer outside the conducting pad. A conducting layer is electrically connected to the conducting pad (150) and extends to the upper recess and the side recess.
Abstract:
An electronic device and fabrication method thereof are provided. The electronic device contains a glass substrate (100), a patterned semiconductor substrate (108), having at least one opening (122,124), disposed on the glass substrate and at least one passive component (200A,200B) having a first conductive layer (104a,104b) and a second conductive layer (112a-c), wherein the first conductive layer is disposed between the patterned semiconductor substrate and the glass substrate.
Abstract:
An electronic device and fabrication method thereof are provided. The electronic device contains a glass substrate (100), a patterned semiconductor substrate (108), having at least one opening (122,124), disposed on the glass substrate and at least one passive component (200A,200B) having a first conductive layer (104a,104b) and a second conductive layer (112a-c), wherein the first conductive layer is disposed between the patterned semiconductor substrate and the glass substrate.
Abstract:
Chip packages and methods for forming the same are provided. The method includes providing a substrate having a chip region and a scribe-line region surrounding the chip region and forming a dielectric layer on an upper surface of the substrate. A dummy structure is formed in the dielectric layer over the scribe-line region of the substrate and extends along edges of the chip region. The dummy structure includes a first stack of dummy metal layers and a second stack of dummy metal layers arranged concentrically from the inside to the outside. The method also includes performing a sawing process on a portion of the dielectric layer that surrounds the dummy structure, so as to form a saw opening through the dielectric layer. At least the first stack of dummy metal layers remains in the dielectric layer after the sawing process is performed.
Abstract:
Chip packages and methods for forming the same are provided. The method includes providing a substrate having upper and lower surfaces, and having a chip region and a scribe-line region surrounding the chip region. The substrate has a dielectric layer on its upper surface. A masking layer is formed over the substrate to cover the dielectric layer. The masking layer has a first opening exposing the dielectric layer and extending in the extending direction of the scribe-line region to surround the chip region. An etching process is performed on the dielectric layer directly below the first opening, to form a second opening that is in the dielectric layer directly below the first opening. The masking layer is removed to expose the dielectric layer having the second opening. A dicing process is performed on the substrate through the second opening.