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公开(公告)号:KR102068161B1
公开(公告)日:2020-01-20
申请号:KR1020180029630
申请日:2018-03-14
Applicant: (주)파트론
Inventor: 정영우 , 조성원
IPC: H01L31/12 , H01L31/08 , H01L31/048 , H01L33/54 , H01L33/00 , H01L31/18