公开(公告)号：KR100918671B1

公开(公告)日：2009-09-22

申请号：KR1020080039323

申请日：2008-04-28

Applicant: 재단법인서울대학교산학협력재단

Inventor： 이병호 ,  임용준 ,  김세윤

IPC: H01L21/027

Abstract: 본 발명은 박막 패터닝 방법에 관한 것이다.
본 발명은, 금속박막과 금속박막 하단의 광반응성 물질의 경계면에 여기되는 표면 플라즈몬 파 간의 간섭패턴과, 광반응성 물질의 내부로 진행하는 광 도파 모드 간의 간섭패턴을 이용하여 광반응성 물질을 패터닝한다.
박막 패터닝, 표면 플라즈몬 파(surface plasmon wave), 광 도파 모드(guided mode)

公开(公告)号：KR1020090093728A

公开(公告)日：2009-09-02

申请号：KR1020080039324

申请日：2008-04-28

Applicant: 재단법인서울대학교산학협력재단

Inventor： 이병호 ,  한준구 ,  김휘 ,  임용준

IPC: G02B6/12

Abstract: A method for conforming phase of a surface plasmon wave and a method for trimming a surface plasmon wave-guide are provided to match the phase of the surface plasmon by cutting out the surface plasmon waveguide by a phase of surface plasmon wave. In a method for conforming phase of a surface plasmon wave and a method for trimming a surface plasmon wave-guide, a surface plasmon wave is measured, and the phase measurement value corresponding to the phase of the surface plasmon wave is generated(S300). The tolerance range corresponding to the target value which is predetermined in advanced and the phase measurement value are compared(S400). If the phase measurement value is not included in the tolerance range, the shape of the surface plasmon waveguide is transformed(S500).

Abstract translation: 提供一种表面等离子体激元波相位的方法和修整表面等离子体波导的方法，以通过用表面等离子体波的相切割表面等离子体波导来匹配表面等离子体的相位。 在表面等离子体激元波相位的方法和修整表面等离子体波导的方法中，测量表面等离子体激元波，并且生成与表面等离激元波的相位对应的相位测量值（S300）。 对与预先设定的目标值相对应的公差范围和相位测量值进行比较（S400）。 如果相位测量值不包括在公差范围内，则表面等离子体波导的形状被变换（S500）。

公开(公告)号：KR1020090093727A

公开(公告)日：2009-09-02

申请号：KR1020080039323

申请日：2008-04-28

Applicant: 재단법인서울대학교산학협력재단

Inventor： 이병호 ,  임용준 ,  김세윤

IPC: H01L21/027

CPC classification number: G03F7/2006

Abstract: A method for forming a thin film pattern is provided to form the fine pattern formation by forming the interference pattern between the optical guided mode and the interference pattern between surface plasmon waves. The surface plasmon wave is excited in the boundary of the photo reactive material of the metallic thin film and the metallic thin film(S101). The interference pattern by the surface plasmon wave is formed(S102). The photo reactive material is exposed by the interference pattern(S105). The light guided mode is formed by the incident light having a specific incident angle to a prism. The photo reactive material is exposed by the interference pattern.

Abstract translation: 提供一种形成薄膜图形的方法，通过在光学引导模式和表面等离子体波之间的干涉图案之间形成干涉图案来形成精细图案。 表面等离子体波在金属薄膜和金属薄膜的光反应性材料的边界中被激发（S101）。 形成表面等离子体波的干涉图案（S102）。 光反应性材料被干涉图案曝光（S105）。 光引导模式由与棱镜具有特定入射角的入射光形成。 光反应性材料被干涉图形曝光。

公开(公告)号：KR100928335B1

公开(公告)日：2009-11-26

申请号：KR1020080039324

申请日：2008-04-28

Applicant: 재단법인서울대학교산학협력재단

Inventor： 이병호 ,  한준구 ,  김휘 ,  임용준

IPC: G02B6/12

Abstract: A method for conforming phase of a surface plasmon wave and a method for trimming a surface plasmon wave-guide are provided to match the phase of the surface plasmon by cutting out the surface plasmon waveguide by a phase of surface plasmon wave. In a method for conforming phase of a surface plasmon wave and a method for trimming a surface plasmon wave-guide, a surface plasmon wave is measured, and the phase measurement value corresponding to the phase of the surface plasmon wave is generated(S300). The tolerance range corresponding to the target value which is predetermined in advanced and the phase measurement value are compared(S400). If the phase measurement value is not included in the tolerance range, the shape of the surface plasmon waveguide is transformed(S500).

Abstract translation: 提供一种用于使表面等离子体振子波的相位匹配的方法和用于修整表面等离子体振子波导的方法，以通过将表面等离子体波导切除表面等离子体振子波的相位来匹配表面等离子体激元的相位。 在用于使表面等离子体振子波的相位一致的方法和用于修整表面等离子体振子波导的方法中，测量表面等离子体振子波，并生成与表面等离子体振子波的相位对应的相位测量值（S300）。 比较与提前预定的目标值和相位测量值相对应的容差范围（S400）。 如果相位测量值不包括在公差范围内，则变换表面等离子体波导的形状（S500）。