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公开(公告)号：KR102167637B1
公开(公告)日：2020-10-19
申请号：KR1020190166028
申请日：2019-12-12
Applicant: 전남대학교산학협력단
IPC: H01L31/032 , H01L31/0445 , H01L31/18 , H01L21/324 , H01L21/67
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