公开(公告)号：KR101250794B1

公开(公告)日：2013-04-04

申请号：KR1020110115643

申请日：2011-11-08

Applicant: 한국과학기술연구원

Inventor： 조일주 ,  윤의성 ,  김양희

IPC: G01N33/48 ,  A61M23/00 ,  H01L21/00

Abstract: PURPOSE: A structure having a micro fluid channel and a manufacturing method thereof are provided to form a fluid channel without increasing the total thickness. CONSTITUTION: A structure having a micro fluid channel includes a wafer(120) formed with a micro fluid channel which is concavely carved on the silicon surface of the wave by an etching process and a sheet of glass(140) polished to form a continuous surface with the surface of the wafer. The glass is bonded by covering the upper part of the micro channel of the wafer in a vacuum state. The glass is polished to have the continuous surface with the surface of the wafer after a part of the glass is melted by a reflow process inside the fluid channel to a fixed depth.

Abstract translation: 目的：提供具有微流体通道的结构及其制造方法，以形成流体通道而不增加总厚度。 构成：具有微流体通道的结构包括形成有微流体通道的晶片（120），该微流体通道通过蚀刻工艺凹陷地雕刻在波的硅表面上，并且抛光的玻璃片（140）形成连续表面 与晶片的表面。 通过在真空状态下覆盖晶片的微通道的上部来粘合玻璃。 在玻璃的一部分通过流体通道内的回流工艺熔化到固定深度之前，将玻璃抛光以具有与晶片表面的连续表面。