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公开(公告)号:KR1020100111566A
公开(公告)日:2010-10-15
申请号:KR1020090030058
申请日:2009-04-07
Applicant: 한국교통대학교산학협력단
IPC: H01Q7/00 , G06K19/077 , H01Q1/38
Abstract: PURPOSE: An RFID tag miniaturized loop antenna and a manufacturing method thereof are provided to implement the miniaturized surface mounted device by forming a single chip using semiconductor process. CONSTITUTION: A substrate of a silicon and oxide silicon structure is offered. The antenna is embodied on the substrate in the form of the spiral loop. The line width(W1) of the antenna loop is 50~150um. The line consisting the antenna roof is made of the aluminum foil of about 2 um thickness. The self resonant frequency of the loop antenna is 100MHz or greater.
Abstract translation: 目的:提供RFID标签小型环形天线及其制造方法,以通过使用半导体工艺形成单个芯片来实现小型化的表面安装装置。 构成:提供硅和氧化硅结构的衬底。 天线以螺旋环的形式体现在基板上。 天线回路的线宽(W1)为50〜150um。 由天线屋顶组成的线由大约2μm厚的铝箔制成。 环形天线的自谐振频率为100MHz以上。