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公开(公告)号:KR101956820B1
公开(公告)日:2019-03-13
申请号:KR1020170141406
申请日:2017-10-27
Applicant: 한국에너지기술연구원
Inventor: 유충열 , 박상현 , 윤하나 , 황주연 , 김영선
IPC: H01L35/30 , H01L35/34 , G01K7/02