公开(公告)号：JPH03181870A

公开(公告)日：1991-08-07

申请号：JP32334990

申请日：1990-11-28

Applicant: CASCADE MICROTECH INC

Inventor： ERITSUKU DABURIYUU SUTORAIDO ,  ANDORIYU SHII DABITSUDOSON

IPC: G01R27/04 ,  G01R27/28 ,  G01R31/00 ,  G01R35/00

Abstract: PURPOSE: To correct the error factor of an error model, which involves N error factors, by reducing a modeled error with new error factor obtained by changing at least one of the error factors of quantity N. CONSTITUTION: A theoretical network analyzer 22 is connected to a device (DUT) 24 to be tested, and an error network 28 for modeling the characteristics of a transmission line and a testing instrument inserted between the DUT 24 and an actual measuring surface 30, probe head and other circuits is put between a desired measuring surface 26 and an analyzer 22. In the error model having the error factors of quantity N, at least one of the error factors of quantity N is changed to obtain a new error factor. By reducing modeled errors with the new error factor, it is possible to correct the error due to the error factor of the error model.