公开(公告)号：EP2630508A4

公开(公告)日：2017-12-27

申请号：EP11834955

申请日：2011-10-18

Applicant: CASCADE MICROTECH INC

Inventor： NEGISHI KAZUKI ,  HARRIS STEVE ,  STRID ERIC W ,  BOLT BRYAN

IPC: G01J1/42 ,  G01J1/02 ,  G01J1/04 ,  G01J1/32 ,  G01R31/26 ,  H05K13/08

CPC classification number: G01J1/32 ,  G01J1/0242 ,  G01J1/0425 ,  G01J2001/0481 ,  G01J2001/4247 ,  G01R31/2635

Abstract: Systems and methods for simultaneous optical testing of a plurality of devices under test. These systems and methods may include the use of an optical probe assembly that includes a power supply structure that is configured to provide an electric current to a plurality of devices under test (DUTs) and an optical collection structure that is configured to simultaneously collect electromagnetic radiation that may be produced by the plurality of DUTs and to provide the collected electromagnetic radiation to one or more optical detection devices. The systems and methods also may include the use of the optical probe assembly in an optical probe system to evaluate one or more performance parameters of each of the plurality of DUTs.