公开(公告)号：US20150219501A1

公开(公告)日：2015-08-06

申请号：US14686616

申请日：2015-04-14

Applicant: California Incapacitated of Technology

Inventor： James Kent Wallace

IPC: G01J9/02

CPC classification number: G01J9/0215 ,  G01J9/00 ,  G01J9/02 ,  G01J2009/0226

Abstract: Hybrid sensors comprising Shack-Hartmann Wavefront Sensor (S-HWFS) and Zernike Wavefront Sensor (Z-WFS) capabilities are presented. The hybrid sensor includes a Z-WFS optically arranged in-line with a S-HWFS such that the combined wavefront sensor operates across a wide dynamic range and noise conditions. The Z-WFS may include the ability to introduce a dynamic phase shift in both transmissive and reflective modes.

Abstract translation: 提出了包括Shack-Hartmann波前传感器（S-HWFS）和Zernike波前传感器（Z-WFS）功能的混合传感器。 混合传感器包括与S-HWFS成线性配置的Z-WFS，使得组合的波前传感器在宽动态范围和噪声条件下工作。 Z-WFS可以包括在透射和反射模式中引入动态相移的能力。