ANTIREFLECTION STRUCTURE AND METHOD OF MANUFACTURING THE SAME

    公开(公告)号:US20200271830A1

    公开(公告)日:2020-08-27

    申请号:US16872233

    申请日:2020-05-11

    Abstract: An antireflection structure includes an antireflection film provided on a front surface of a substrate. The antireflection film has a plurality of holes that are spatially and periodically arranged and pass through front and back surfaces of the antireflection film. A thickness and a relative dielectric constant of the antireflection film are set according to a relative dielectric constant and a thickness of the substrate and an incident angle θ of an electromagnetic wave. The thickness and the relative dielectric constant of the antireflection film are set for an electromagnetic wave incident at the angle θ so that, for example, an electromagnetic wave reflected by the antireflection film provided on the front surface of the substrate and an electromagnetic wave reflected by a back surface of the substrate deviate from each other by a half wavelength and cancel each other.

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